At the New Product Introduction (NPI) stage of silicon chip production, product engineers work with a limited but critical dataset – typically from initial silicon samples or engineering lots – ...
Increasingly tight tolerances and rigorous demands for quality are forcing chipmakers and equipment manufacturers to ferret out minor process variances, which can create significant anomalies in ...
These models can be used either offline to provide the optimal process cycle, or online to provide optimal, real-time process control [3]. This is the target of the iREMO project (www.iremo.eu), an EC ...
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