A new technical paper titled “Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review” was published by researchers at KU Leuven and imec. “In this ...
Automated optical inspection (AOI) is a cornerstone in semiconductor manufacturing, assembly and testing facilities, and as such, it plays a crucial role in yield management and process control.
Two questions asked in this paper were: is the measurement by 4D InSpec equivalent on the original surface in respect to a replica, that is, how similar are the results? And: under what circumstances ...
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